alumina ceramic pcb vs aluminum pcb

Alumina Ceramics - Advanced Ceramics

Alumina Ceramics Al 2 O 3

Alumina Ceramic Materials in Multiple Grades of Purity

Alumina ceramics are one of the most robust ceramics available. Alumina ceramics have outstanding properties that make them one of the most widely used ceramics for structural, wear, and corrosive environments. Additionally, with their exceptional electrical properties, high purity alumina ceramics are one of the preferred materials for semiconductor chamber applications.

Applications

Chamber parts in semiconductor equipment
Wafer transfer parts
FPD manufacturing equipment parts
Heat resistant and electrical insulation parts

Properties

			AS999	AG999	AM997
General properties	Characteristics	High purity	Plasma-resistant	General grade
Main component purity (wt%)		99.99	99.9	99.7
Color		White	Whitish-yellow	Whitish-yellow
Density (g/cm 3)		3.95	3.93	3.93
Water absorption (%)		0	0	0
Mechanical properties	Bending strength (MPa)	390	390	390
Young’s modulus (GPa)		380	380	375
Vickers hardness (GPa)		18	17	18
Thermal properties	Max. operating temperature (°C)	1600	1600	1600
Coefficient of thermal expansion (1/°C×10-6)	RT~500°C	7	7.4	7
	RT~800°C	7.7	8.1	7.6
Coefficient of thermal conductivity (W/m×K)		33	30	33
Thermal shock resistance ΔT (°C)		200	–	200
Electrical properties	Volume resistivity	25°C	10 15	10 15	10 16
		300°C	10 12	–	10 13
		500°C	10 9	–	10 10
		800°C	10 7	–	10 9
Dielectric constant	10GHz	9.9	9.7	9.7
Dielectric loss (×10-4)		0.5	6	1
Q factor (×10 4)		2	0.2	1
Dielectric breakdown voltage (KV/mm)		18	17	18

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